| TFT ARRAY mask specifications | TFT CF mask specifications |
|---|---|
| 330×450×5.0 | 450×550×5.0 |
| 520×610×10.0 | 508×609.6×5.0 |
| 520×800×10.0 | 700×800×8.0 |
| 800×920×10.0 | 800×920×8.0/10.0 |
| 800×945×10.0 | 800×960×8.0/10.0 |
| 850×1200×10.0 | 850×1200×10.0 |
| 980×1150×13.0 | 850×1400×10.0 |
| 980×1550×10.0 | 1220×1400×13.0 |
| 1220×1400×13.0 | 1220×1650×15.0 |
| 1620×1780×17.0 | 1620×1780×17.0 |
| a-Si TFT Mask Spec | TFT Array | Color Filter | |||||
| Normal | High Spec | HTM | Normal | HTM | PSM | ||
| CD | Tolerance | ±0.2um | ±0.05um | ±0.15um | ±0.3um | ±0.3um | ±0.15um |
| Range | ≤0.25um | ≤0.05um | ≤0.2um | ≤0.35um | ≤0.35um | ≤0.2um | |
| Registration | P/A | ±0.5um | ±0.25um | ±0.5um | ±0.5um | ±0.5um | ±0.5um |
| 0/A | ±0.5um | ±0.3um | ±0.5um | ±0.5um | ±0.5um | ±0.5um | |
| T/P | ±0.5um | ±0.3um | ±0.4um | ±0.5um | ±0.5um | ±0.5um | |
| LTPS/LTPO/AMOLED Mask Spec Mask Grade | Grade 1 | Grade 2 | Grade 3 | Grade 4 | |
| Line/Space(Min.width) | 3.0um≤ Typ. | 2.5um≤ Typ. | 2.0um≤ Typ. | 1.5um≤ Typ. | |
| CD | Tolerance | ±0.35um | ±0.2um | ±0.1um | ±0.08um |
| Range | ≤0.35um | ≤0.2um | ≤0.1um | ≤0.08um | |
| Registration | Position Accuracy | ±0.5um | ±0.4um | ±0.3um | ±0.25um |
| Total Pitch | ±0.5um | ±0.4um | ±0.4um | ±0.3um | |
| Overlay Accuracy | ±0.4um | ±0.35um | ±0.35um | ±0.3um | |
