Shenzhen Newway Optoelectronics Co., Ltd
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Photomask for Display Photomask for Semiconductors
IC

Photomask for Semiconductors

In the semiconductor field, NEWWAY's semiconductor photomasks are widely applied in Integrated Circuits (IC), semiconductor devices, advanced packaging, and more. Through the investment in Luxin Semiconductor, the company's semiconductor photomask layout has advanced to the 40nm process node, with future plans to extend further to the 28nm node.

PRODUCT PARAMETERS

MASK SIZE METERIAL MIN L/S
3006 Soda 2um
4009 Quartz&Soda 1um
5009 Quartz&Soda 1um
6009 Quartz&Soda 1um
6012 Quartz&Soda 1um
6025 Quartz 0.5um
7009 Quartz&Soda 1um
9012 Quartz&Soda 1um
14inch Quartz&Soda 1um

PRODUCT ACCURACY

Item Grade S R O N M L K J I H G F E D C B A
CD Tolerance Tolerance for single point(±nm) ---- ---- ---- ---- ---- ---- ---- ---- ---- ---- ---- 50 70 100 120 150 200
CD mean to target (±nm) 4 4 7 8 10 12 15 20 25 30 40 ---- ---- ---- ---- ---- ----
CD Range (nm) 5 5 8 10 12 15 20 25 30 40 40 50 70 100 120 150 200
Registration & overlay Based on the 1st layer(±nm) 11 11 14 16 18 20 25 30 40 50 70 80 100 120 150 250 300
Defect Defect size(nm) 50 72 100 120 120 150 150 200 200 250 250 300 350 350 500 1000 1500
Particle Pellicle Film ≥30um 0 0 0 0 0 0 N0 0 0 0 0 0 0 0 0 0 0
10-30um ≤10 ≤10 ≤10 ≤10 ≤10 ≤10 ≤10 ≤10 ≤10 ≤10 ≤10 ≤10 ≤10 ≤10 ≤10 ≤10 ≤10
on Chrome
(not movable)		 ≥2.0um 0 pcs 0 pcs 0 pcs 0 pcs 0 pcs 0 pcs 0 pcs 0 pcs 0 pcs 0 pcs 0 pcs 0 pcs 0 pcs 0 pcs 0 pcs 0 pcs 0 pcs
1.0-2.0um 0 pcs 0 pcs 0 pcs 0 pcs 0 pcs 0 pcs 0 pcs 0 pcs 0 pcs 0 pcs 0 pcs 5 pcs 5 pcs 5 pcs 5 pcs 5 pcs 5 pcs
0.5-1.0um 10pcs 10pcs 10pcs 10pcs 10pcs 10pcs 10pcs 10pcs 10pcs 10pcs 10pcs 10pcs ---- ---- ---- ---- ----
KrF PSM Transparency Tolerance(PSM) 6±0.3 6±0.3 6±0.3 6±0.3 6±0.3 6±0.3 6±0.3 6±0.5 6±0.5 6±0.5 6±0.5 ---- ---- ---- ---- ---- ----
Phase Angle (degree) Tolerance(PSM) 180±3° 180±3° 180±3° 180±3° 180±3° 180±3° 180±3° 180±3° 180±3° 180±3° 180±3° ---- ---- ---- ---- ---- ----
ArF PSM Transparency Tolerance(PSM) 6.3±0.3 6.3±0.3 6.3±0.3 6.3±0.3 6.3±0.3 6.3±0.3 6.3±0.3 6.3±0.5 6.3±0.5 6.3±0.5 6.3±0.5 ---- ---- ---- ---- ---- ----
Phase Angle (degree) Tolerance(PSM) 180±3° 180±3° 180±3° 180±3° 180±3° 180±3° 180±3° 180±3° 180±3° 180±3° 180±3° ---- ---- ---- ---- ---- ----
Remark 　 　 14-28nm 28nm 40nm 45nm 65nm 90nm 0.13um 0.15um 0.16um 0.18um 0.2um 0.25um 0.35um 0.5um 0.8um 1um ≥1um

APPLICATION AREAS

  • Integrated Circuits (IC): MCU, CIS, DDIC, PMIC, etc.
  • Advanced Packaging: TSV, TGV, CPO, FOPLP, COF, FC, BGA, etc.
  • Semiconductor Devices: Discrete Devices, MEMS, Compound Semiconductors, Power Semiconductors, etc.
  • Pan-Semiconductor Display: Micro-LED, Micro-OLED, LCOS, etc.
APPLICATION AREAS